Numerical Simulation of the Deformation of Some MEMS

Gutierrez G. S., Bermudez B., Alanis J. D.

In this paper we present the numerical simulation of the deformation of two Micro-Electromechanical Systems (MEMS), a trampoline-type one i.e. a rectangular cantilever beam and an accelerometer that consists of a square plate with all edges simply supported. The deformation of these systems is modeled by fourth-order differential equations, ordinary and partial respectively. We find the approximate solutions by using the finite differences method programmed in Matlab, solving the system of linear equations associated with different methods to evaluate the efficiency of these. We obtained very good approximations with small errors compared to other articles that use other approaches.